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  <xsd:element id="acls_LeaseQuantitativeDisclosureTableTextBlock" name="LeaseQuantitativeDisclosureTableTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
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  <xsd:element id="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" name="FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" name="LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_RepaymentOfNetSettlementOnRestrictedStockGrants" name="RepaymentOfNetSettlementOnRestrictedStockGrants" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="credit" />
  <xsd:element id="acls_ContractWithCustomerLiabilityDeferralOfRevenue" name="ContractWithCustomerLiabilityDeferralOfRevenue" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
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  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
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  <xsd:element name="IncreaseDecreaseInIncomeTaxExpenseBenefit" id="acls_IncreaseDecreaseInIncomeTaxExpenseBenefit" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" xbrli:balance="debit" />
  <xsd:element name="CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock" id="acls_CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" />
  <xsd:element name="CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" id="acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="instant" abstract="false" xbrli:balance="debit" />
</xsd:schema>
