<?xml version="1.0" encoding="utf-8"?>
<!--XBRL document created with Toppan Merrill Bridge  10.5.0.8 -->
<!--Based on XBRL 2.1-->
<!--Created on: 2/23/2024 9:40:25 PM-->
<!--Modified on: 2/23/2024 9:40:25 PM-->
<xsd:schema targetNamespace="http://www.axcelis.com/20231231" attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xsd="http://www.w3.org/2001/XMLSchema" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:xl="http://www.xbrl.org/2003/XLink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:attributeFormDefault="unqualified" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:country="http://xbrl.sec.gov/country/2023" xmlns:us-gaap="http://fasb.org/us-gaap/2023" xmlns:us-types="http://fasb.org/us-types/2023" xmlns:negated="http://www.xbrl.org/2009/role/negated" xmlns:srt-types="http://fasb.org/srt-types/2023" xmlns:dtr-types="http://www.xbrl.org/dtr/type/2022-03-31" xmlns:acls="http://www.axcelis.com/20231231" xmlns:enum2="http://xbrl.org/2020/extensible-enumerations-2.0" xmlns:currency="http://xbrl.sec.gov/currency/2023" xmlns:us-roles="http://fasb.org/us-roles/2023" xmlns:ref="http://www.xbrl.org/2006/ref" xmlns:sic="http://xbrl.sec.gov/sic/2023" xmlns:srt-roles="http://fasb.org/srt-roles/2023" xmlns:stpr="http://xbrl.sec.gov/stpr/2023" xmlns:utr="http://www.xbrl.org/2009/utr" xmlns:exch="http://xbrl.sec.gov/exch/2023" xmlns:naics="http://xbrl.sec.gov/naics/2023" xmlns:srt="http://fasb.org/srt/2023" xmlns:deprecated="http://www.xbrl.org/2009/role/deprecated" xmlns:net="http://www.xbrl.org/2009/role/net" xmlns:dei="http://xbrl.sec.gov/dei/2023" xmlns:dtr="http://www.xbrl.org/2009/dtr" xmlns:xbrldi="http://xbrl.org/2006/xbrldi" xmlns:ecd="http://xbrl.sec.gov/ecd/2023" xmlns:ecd-sub="http://xbrl.sec.gov/ecd-sub/2023">
  <xsd:annotation>
    <xsd:appinfo>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureStandardAndCustomAxisDomainDefaults" id="DisclosureStandardAndCustomAxisDomainDefaults">
        <link:definition>99900 - Disclosure - Standard And Custom Axis Domain Defaults</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations" id="StatementConsolidatedStatementsOfOperations">
        <link:definition>00100 - Statement - Consolidated Statements of Operations</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome" id="StatementConsolidatedStatementsOfComprehensiveIncome">
        <link:definition>00200 - Statement - Consolidated Statements of Comprehensive Income</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/StatementConsolidatedBalanceSheets" id="StatementConsolidatedBalanceSheets">
        <link:definition>00300 - Statement - Consolidated Balance Sheets</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows" id="StatementConsolidatedStatementsOfCashFlows">
        <link:definition>00500 - Statement - Consolidated Statements of Cash Flows</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails" id="DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails">
        <link:definition>40205 - Disclosure - Summary of Significant Accounting Policies - Net Income per Share (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails" id="DisclosureCashCashEquivalentsAndRestrictedCashDetails">
        <link:definition>40401 - Disclosure - Cash, cash equivalents and restricted cash (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesComponentsOfAccountsReceivableDetails" id="DisclosureAccountsReceivableAndAllowanceForCreditLossesComponentsOfAccountsReceivableDetails">
        <link:definition>40502 - Disclosure - Accounts Receivable and Allowance for Credit Losses - Components of Accounts Receivable (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureInventoriesNetDetails" id="DisclosureInventoriesNetDetails">
        <link:definition>40601 - Disclosure - Inventories, net (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2" id="DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2">
        <link:definition>40604 - Disclosure - Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details) Cal 2</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails" id="DisclosurePropertyPlantAndEquipmentNetDetails">
        <link:definition>40701 - Disclosure - Property, Plant and Equipment, net (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails" id="DisclosureAssetsManufacturedForInternalUseNetComponentsDetails">
        <link:definition>40801 - Disclosure - Assets Manufactured for Internal Use, net - Components (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails" id="DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails">
        <link:definition>40902 - Disclosure - Leases - Operating and Finance Lease Right-of-use-assets and Related Lease Obligations (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails" id="DisclosureLeasesLeaseCostDetails">
        <link:definition>40903 - Disclosure - Leases - Lease Cost (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails" id="DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails">
        <link:definition>40904 - Disclosure - Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureProductWarrantyDetails" id="DisclosureProductWarrantyDetails">
        <link:definition>41001 - Disclosure - Product Warranty (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails" id="DisclosureFairValueMeasurementsDetails">
        <link:definition>41501 - Disclosure - Fair Value Measurements (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesIncomeBeforeIncomeTaxesDetails" id="DisclosureIncomeTaxesIncomeBeforeIncomeTaxesDetails">
        <link:definition>41801 - Disclosure - Income Taxes - Income before Income Taxes (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails" id="DisclosureIncomeTaxesProvisionForIncomeTaxesDetails">
        <link:definition>41802 - Disclosure - Income Taxes - Provision for Income Taxes (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails" id="DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails">
        <link:definition>41803 - Disclosure - Income Taxes - Reconciliation of Income Taxes (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails" id="DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails">
        <link:definition>41804 - Disclosure - Income Taxes - components of Long Term Deferred Income Taxes (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DocumentDocumentAndEntityInformation" id="DocumentDocumentAndEntityInformation">
        <link:definition>00090 - Document - Document and Entity Information</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/StatementConsolidatedBalanceSheetsParenthetical" id="StatementConsolidatedBalanceSheetsParenthetical">
        <link:definition>00305 - Statement - Consolidated Balance Sheets (Parenthetical)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity" id="StatementConsolidatedStatementsOfStockholdersEquity">
        <link:definition>00400 - Statement - Consolidated Statements of Stockholders' Equity</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureNatureOfBusiness" id="DisclosureNatureOfBusiness">
        <link:definition>10101 - Disclosure - Nature of Business</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureRevenue" id="DisclosureRevenue">
        <link:definition>10301 - Disclosure - Revenue</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCash" id="DisclosureCashCashEquivalentsAndRestrictedCash">
        <link:definition>10401 - Disclosure - Cash, cash equivalents and restricted cash</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureInventoriesNet" id="DisclosureInventoriesNet">
        <link:definition>10601 - Disclosure - Inventories, net</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureProductWarranty" id="DisclosureProductWarranty">
        <link:definition>11001 - Disclosure - Product Warranty</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureFinancingArrangements" id="DisclosureFinancingArrangements">
        <link:definition>11101 - Disclosure - Financing Arrangements</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureFairValueMeasurements" id="DisclosureFairValueMeasurements">
        <link:definition>11501 - Disclosure - Fair Value Measurements</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureCommitmentsAndContingencies" id="DisclosureCommitmentsAndContingencies">
        <link:definition>11601 - Disclosure - Commitments and Contingencies</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxes" id="DisclosureIncomeTaxes">
        <link:definition>11801 - Disclosure - Income Taxes</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPolicies" id="DisclosureSummaryOfSignificantAccountingPoliciesPolicies">
        <link:definition>20202 - Disclosure - Summary of Significant Accounting Policies (Policies)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesTables" id="DisclosureSummaryOfSignificantAccountingPoliciesTables">
        <link:definition>30203 - Disclosure - Summary of Significant Accounting Policies (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashTables" id="DisclosureCashCashEquivalentsAndRestrictedCashTables">
        <link:definition>30403 - Disclosure - Cash, cash equivalents and restricted cash (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesTables" id="DisclosureAccountsReceivableAndAllowanceForCreditLossesTables">
        <link:definition>30503 - Disclosure - Accounts Receivable and Allowance for Credit Losses (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureInventoriesNetTables" id="DisclosureInventoriesNetTables">
        <link:definition>30603 - Disclosure - Inventories, net (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetTables" id="DisclosurePropertyPlantAndEquipmentNetTables">
        <link:definition>30703 - Disclosure - Property, Plant and Equipment, net (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetTables" id="DisclosureAssetsManufacturedForInternalUseNetTables">
        <link:definition>30803 - Disclosure - Assets Manufactured for Internal Use, net (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureProductWarrantyTables" id="DisclosureProductWarrantyTables">
        <link:definition>31003 - Disclosure - Product Warranty (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansTables" id="DisclosureEmployeeBenefitPlansTables">
        <link:definition>31203 - Disclosure - Employee Benefit Plans (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationTables" id="DisclosureStockAwardPlansAndStockBasedCompensationTables">
        <link:definition>31303 - Disclosure - Stock Award Plans and Stock Based Compensation (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureFairValueMeasurementsTables" id="DisclosureFairValueMeasurementsTables">
        <link:definition>31503 - Disclosure - Fair Value Measurements (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationTables" id="DisclosureBusinessSegmentAndGeographicRegionInformationTables">
        <link:definition>31703 - Disclosure - Business Segment and Geographic Region Information (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesTables" id="DisclosureIncomeTaxesTables">
        <link:definition>31803 - Disclosure - Income Taxes (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails" id="DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails">
        <link:definition>40202 - Disclosure - Summary of Significant Accounting Policies - Property, Plant and Equipment and Impairment of Long Lived Assets (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails" id="DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails">
        <link:definition>40203 - Disclosure - Summary of Significant Accounting Policies - Concentration of Risk (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesRevenueRecognitionDetails" id="DisclosureSummaryOfSignificantAccountingPoliciesRevenueRecognitionDetails">
        <link:definition>40204 - Disclosure - Summary of Significant Accounting Policies - Revenue Recognition (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesAccumulatedOtherComprehensiveIncomeDetails" id="DisclosureSummaryOfSignificantAccountingPoliciesAccumulatedOtherComprehensiveIncomeDetails">
        <link:definition>40206 - Disclosure - Summary of Significant Accounting Policies - Accumulated Other Comprehensive Income (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureRevenueDetails" id="DisclosureRevenueDetails">
        <link:definition>40301 - Disclosure - Revenue (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails" id="DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails">
        <link:definition>40302 - Disclosure - Revenue - Revenue by discipline &amp; geographical areas (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureInventoriesNetAdditionalInformationDetails" id="DisclosureInventoriesNetAdditionalInformationDetails">
        <link:definition>40602 - Disclosure - Inventories, net - Additional Information (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeasesDetails" id="DisclosureLeasesDetails">
        <link:definition>40901 - Disclosure - Leases (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails" id="DisclosureFinancingArrangementsDetails">
        <link:definition>41101 - Disclosure - Financing Arrangements (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansDefinedContributionPlanDetails" id="DisclosureEmployeeBenefitPlansDefinedContributionPlanDetails">
        <link:definition>41201 - Disclosure - Employee Benefit Plans - Defined Contribution Plan (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansOtherCompensationPlansDetails" id="DisclosureEmployeeBenefitPlansOtherCompensationPlansDetails">
        <link:definition>41202 - Disclosure - Employee Benefit Plans - Other Compensation Plans (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails" id="DisclosureStockAwardPlansAndStockBasedCompensationDetails">
        <link:definition>41301 - Disclosure - Stock Award Plans and Stock Based Compensation (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureStockholdersEquityDetails" id="DisclosureStockholdersEquityDetails">
        <link:definition>41401 - Disclosure - Stockholders' Equity (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureCommitmentsAndContingenciesDetails" id="DisclosureCommitmentsAndContingenciesDetails">
        <link:definition>41601 - Disclosure - Commitments and Contingencies (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueByProductLineDetails" id="DisclosureBusinessSegmentAndGeographicRegionInformationRevenueByProductLineDetails">
        <link:definition>41702 - Disclosure - Business Segment and Geographic Region Information - Revenue by Product Line (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails" id="DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails">
        <link:definition>41703 - Disclosure - Business Segment and Geographic Region Information - Revenue and Long-Lived Assets (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesUnrecognizedTaxBenefitsDetails" id="DisclosureIncomeTaxesUnrecognizedTaxBenefitsDetails">
        <link:definition>41805 - Disclosure - Income Taxes - Unrecognized Tax Benefits (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails" id="DisclosureIncomeTaxesOperatingLossCarryforwardsDetails">
        <link:definition>41807 - Disclosure - Income Taxes - Operating Loss Carryforwards (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails" id="DisclosureScheduleIiValuationAndQualifyingAccountsDetails">
        <link:definition>41901 - Disclosure - Schedule II Valuation and Qualifying Accounts (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPolicies" id="DisclosureSummaryOfSignificantAccountingPolicies">
        <link:definition>10201 - Disclosure - Summary of Significant Accounting Policies</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLosses" id="DisclosureAccountsReceivableAndAllowanceForCreditLosses">
        <link:definition>10501 - Disclosure - Accounts Receivable and Allowance for Credit Losses</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNet" id="DisclosurePropertyPlantAndEquipmentNet">
        <link:definition>10701 - Disclosure - Property, Plant and Equipment, net</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNet" id="DisclosureAssetsManufacturedForInternalUseNet">
        <link:definition>10801 - Disclosure - Assets Manufactured for Internal Use, net</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeases" id="DisclosureLeases">
        <link:definition>10901 - Disclosure - Leases</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureEmployeeBenefitPlans" id="DisclosureEmployeeBenefitPlans">
        <link:definition>11201 - Disclosure - Employee Benefit Plans</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensation" id="DisclosureStockAwardPlansAndStockBasedCompensation">
        <link:definition>11301 - Disclosure - Stock Award Plans and Stock Based Compensation</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureStockholdersEquity" id="DisclosureStockholdersEquity">
        <link:definition>11401 - Disclosure - Stockholders' Equity</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformation" id="DisclosureBusinessSegmentAndGeographicRegionInformation">
        <link:definition>11701 - Disclosure - Business Segment and Geographic Region Information</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccounts" id="DisclosureScheduleIiValuationAndQualifyingAccounts">
        <link:definition>11901 - Disclosure - Schedule II Valuation and Qualifying Accounts</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureRevenueTables" id="DisclosureRevenueTables">
        <link:definition>30303 - Disclosure - Revenue (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeasesTables" id="DisclosureLeasesTables">
        <link:definition>30903 - Disclosure - Leases (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesForeignCurrencyDetails" id="DisclosureSummaryOfSignificantAccountingPoliciesForeignCurrencyDetails">
        <link:definition>40201 - Disclosure - Summary of Significant Accounting Policies - Foreign Currency (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureRevenueDeferredRevenueDetails" id="DisclosureRevenueDeferredRevenueDetails">
        <link:definition>40303 - Disclosure - Revenue - Deferred revenue (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesTradeReceivablesDetails" id="DisclosureAccountsReceivableAndAllowanceForCreditLossesTradeReceivablesDetails">
        <link:definition>40501 - Disclosure - Accounts Receivable and Allowance for Credit Losses - Trade Receivables (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeasesCashFlowByLeaseTypeDetails" id="DisclosureLeasesCashFlowByLeaseTypeDetails">
        <link:definition>40905 - Disclosure - Leases - Cash Flow by Lease Type (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationNumberOfSegmentsDetails" id="DisclosureBusinessSegmentAndGeographicRegionInformationNumberOfSegmentsDetails">
        <link:definition>41701 - Disclosure - Business Segment and Geographic Region Information - Number of Segments (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesAdditionalInformationDetails" id="DisclosureIncomeTaxesAdditionalInformationDetails">
        <link:definition>41806 - Disclosure - Income Taxes - Additional Information (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:linkbaseRef xlink:type="simple" xlink:href="acls-20231231_pre.xml" xlink:role="http://www.xbrl.org/2003/role/presentationLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
      <link:linkbaseRef xlink:type="simple" xlink:href="acls-20231231_cal.xml" xlink:role="http://www.xbrl.org/2003/role/calculationLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
      <link:linkbaseRef xlink:type="simple" xlink:href="acls-20231231_def.xml" xlink:role="http://www.xbrl.org/2003/role/definitionLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
      <link:linkbaseRef xlink:type="simple" xlink:href="acls-20231231_lab.xml" xlink:role="http://www.xbrl.org/2003/role/labelLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
    </xsd:appinfo>
  </xsd:annotation>
  <xsd:import namespace="http://xbrl.sec.gov/ecd/2023" schemaLocation="https://xbrl.sec.gov/ecd/2023/ecd-2023.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/dei/2023" schemaLocation="https://xbrl.sec.gov/dei/2023/dei-2023.xsd" />
  <xsd:import namespace="http://www.xbrl.org/dtr/type/2022-03-31" schemaLocation="https://www.xbrl.org/dtr/type/2022-03-31/types.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2009/role/negated" schemaLocation="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2003/instance" schemaLocation="http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd" />
  <xsd:import namespace="http://xbrl.org/2005/xbrldt" schemaLocation="http://www.xbrl.org/2005/xbrldt-2005.xsd" />
  <xsd:import namespace="http://fasb.org/us-roles/2023" schemaLocation="https://xbrl.fasb.org/us-gaap/2023/elts/us-roles-2023.xsd" />
  <xsd:import namespace="http://fasb.org/us-gaap/2023" schemaLocation="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/country/2023" schemaLocation="https://xbrl.sec.gov/country/2023/country-2023.xsd" />
  <xsd:import namespace="http://fasb.org/srt/2023" schemaLocation="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/ecd-sub/2023" schemaLocation="https://xbrl.sec.gov/ecd/2023/ecd-sub-2023.xsd" />
  <xsd:element name="SecondLargestCustomerMember" id="acls_SecondLargestCustomerMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="EquityIncentivePlan2012Member" id="acls_EquityIncentivePlan2012Member" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="AssetsManufacturedForInternalUseDisclosureAbstract" id="acls_AssetsManufacturedForInternalUseDisclosureAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" id="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" type="xbrli:durationItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="LargestCustomerMember" id="acls_LargestCustomerMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="TenLargestCustomersMember" id="acls_TenLargestCustomersMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="ConcentrationRiskNumberOfCustomers" id="acls_ConcentrationRiskNumberOfCustomers" type="xbrli:integerItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" />
  <xsd:element id="acls_ProductWarrantyPeriod" name="ProductWarrantyPeriod" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element name="HighlyCompensatedEmployeesMember" id="acls_HighlyCompensatedEmployeesMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="IonImplantationSystemsServicesAndRoyaltiesMember" id="acls_IonImplantationSystemsServicesAndRoyaltiesMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="OtherProductsSystemsServicesAndRoyaltiesMember" id="acls_OtherProductsSystemsServicesAndRoyaltiesMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element id="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent" name="DeferredTaxAssetsLiabilitiesGrossNoncurrent" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <xsd:element id="acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" name="UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" name="UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element name="AssetsManufacturedForInternalUseMember" id="acls_AssetsManufacturedForInternalUseMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="EmployeeStockPurchasePlanAbstract" id="acls_EmployeeStockPurchasePlanAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" id="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" abstract="false" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" id="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" type="xbrli:durationItemType" substitutionGroup="xbrli:item" abstract="false" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" id="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" id="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" id="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" abstract="false" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="EmployeesMember" id="acls_EmployeesMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element id="acls_NonEmployeeMemberOfBoardOfDirectorMember" name="NonEmployeeMemberOfBoardOfDirectorMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element name="RegularEmployeesMember" id="acls_RegularEmployeesMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element id="acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" name="DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <xsd:element name="StockOptionAwardsMember" id="acls_StockOptionAwardsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="PropertyPlantAndEquipmentUsefulLivesTableTextBlock" id="acls_PropertyPlantAndEquipmentUsefulLivesTableTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" abstract="false" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards" id="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards" type="xbrli:durationItemType" substitutionGroup="xbrli:item" abstract="false" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="DefinedContributionPlanLineItems" id="acls_DefinedContributionPlanLineItems" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="AccumulatedOtherComprehensiveIncomeLossPolicyTextBlock" id="acls_AccumulatedOtherComprehensiveIncomeLossPolicyTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" abstract="false" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation" id="acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:balance="debit" xbrli:periodType="duration" />
  <xsd:element name="ResearchDevelopmentAndOtherTaxCreditMember" id="acls_ResearchDevelopmentAndOtherTaxCreditMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element id="acls_AllowanceForDoubtfulAccountsAndReturnsMember" name="AllowanceForDoubtfulAccountsAndReturnsMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_ChargesRelatedToReflectLowerOfCostOrMarketValue" name="ChargesRelatedToReflectLowerOfCostOrMarketValue" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" name="LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount" name="EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="acls_DepositRelatingToCustomsActivity" name="DepositRelatingToCustomsActivity" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal" name="DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <xsd:element id="acls_SaleAndLeaseBackMember" name="SaleAndLeaseBackMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_BeverlyPropertyOwnerLlcMember" name="BeverlyPropertyOwnerLlcMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_CashCashEquivalentsAndRestrictedCashAbstract" name="CashCashEquivalentsAndRestrictedCashAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_CashCashEquivalentsAndRestrictedCashTextBlock" name="CashCashEquivalentsAndRestrictedCashTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_CashCashEquivalentsAndRestrictedCashTableTextBlock" name="CashCashEquivalentsAndRestrictedCashTableTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember" name="MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_ProvisionForExcessAndObsoleteInventory" name="ProvisionForExcessAndObsoleteInventory" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="acls_ServicesMember" name="ServicesMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_AfterMarketMember" name="AfterMarketMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_PercentageOfPaymentUponShipmentOfTool" name="PercentageOfPaymentUponShipmentOfTool" nillable="true" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" abstract="false" />
  <xsd:element id="acls_PeriodOfPaymentUponDeliveryOfParts" name="PeriodOfPaymentUponDeliveryOfParts" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_PercentageOfPaymentUponInstallation" name="PercentageOfPaymentUponInstallation" nillable="true" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" abstract="false" />
  <xsd:element id="acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock" name="RevenueFromExternalCustomersByDisciplineAreasTableTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations" name="PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_ExtendedProductWarrantyPeriod" name="ExtendedProductWarrantyPeriod" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_RecognizingAssetsRelatedToRecoverableCustomerContractCostsPolicyTextBlock" name="RecognizingAssetsRelatedToRecoverableCustomerContractCostsPolicyTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_AssetsManufacturedForInternalUseDisclosureTextBlock" name="AssetsManufacturedForInternalUseDisclosureTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_InternalUsedAssetsTypeAxis" name="InternalUsedAssetsTypeAxis" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrldt:dimensionItem" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_InternalUsedAssetsTypeDomain" name="InternalUsedAssetsTypeDomain" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_CompletedInternalUseAssetsMember" name="CompletedInternalUseAssetsMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_NewSystemsRevenueMember" name="NewSystemsRevenueMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_LeaseDisclosureTextBlock" name="LeaseDisclosureTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_OperatingAndFinanceLeaseRightOfUseAsset" name="OperatingAndFinanceLeaseRightOfUseAsset" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <xsd:element id="acls_OperatingAndFinanceLeaseLiability" name="OperatingAndFinanceLeaseLiability" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_FinanceLeaseAccumulatedDepreciation" name="FinanceLeaseAccumulatedDepreciation" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_FinanceLeaseCost" name="FinanceLeaseCost" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="acls_LeaseBalanceSheetDisclosureTableTextBlock" name="LeaseBalanceSheetDisclosureTableTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_LeaseCashFlowInformationDisclosureTableTextBlock" name="LeaseCashFlowInformationDisclosureTableTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_ShortTermAndVariableLeaseCost" name="ShortTermAndVariableLeaseCost" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="acls_LeaseQuantitativeDisclosureTableTextBlock" name="LeaseQuantitativeDisclosureTableTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" name="WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" name="FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" name="LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_ContractWithCustomerLiabilityDeferralOfRevenue" name="ContractWithCustomerLiabilityDeferralOfRevenue" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="acls_DeferredTaxAssetOperatingLeaseLiabilities" name="DeferredTaxAssetOperatingLeaseLiabilities" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock" name="OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_ShippingAndHandlingCostsPolicyTextBlock" name="ShippingAndHandlingCostsPolicyTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_NetSettlementOnRestrictedStockGrants" name="NetSettlementOnRestrictedStockGrants" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="acls_SiliconValleyBankMember" name="SiliconValleyBankMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_IncreaseInInventoryReserves" name="IncreaseInInventoryReserves" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="acls_FederalMember" name="FederalMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_CostOfPropertyRepairsAndMaintenanceCapitalized" name="CostOfPropertyRepairsAndMaintenanceCapitalized" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <xsd:element id="acls_DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts" name="DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <xsd:element id="acls_OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve" name="OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element name="PropertyPlantAndEquipmentOtherUsefulLife" id="acls_PropertyPlantAndEquipmentOtherUsefulLife" type="xbrli:durationItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" />
  <xsd:element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders" id="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders" type="xbrli:sharesItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" />
  <xsd:element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan" id="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan" type="xbrli:sharesItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" />
  <xsd:element name="ProductOrServiceMember" id="acls_ProductOrServiceMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock" id="acls_CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" />
  <xsd:element name="CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" id="acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="instant" abstract="false" xbrli:balance="debit" />
  <xsd:element name="EarningsPerShareDetailAbstract" id="acls_EarningsPerShareDetailAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="BenefitOfTaxDeductionsInExcessOfCompensationCost" id="acls_BenefitOfTaxDeductionsInExcessOfCompensationCost" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" xbrli:balance="debit" />
  <xsd:element name="UsGovernmentSecuritiesAndAgencyInvestmentsMember" id="acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="DeferredTaxLiabilitiesInternalRevenueCodeLimitation" id="acls_DeferredTaxLiabilitiesInternalRevenueCodeLimitation" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" xbrli:balance="debit" />
  <xsd:element name="IncreaseInDeferredAssetCapitalizedResearchAndDevelopmentCost" id="acls_IncreaseInDeferredAssetCapitalizedResearchAndDevelopmentCost" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" xbrli:balance="credit" />
</xsd:schema>
